The vacuum plant is designed for coatings deposition of various metals or compounds on their basis. An advantage of the facility is the possibility to obtain single-layer or multi-layer single-compound coatings, and the single-layer or multi-layer multi-component coatings.
Vacuum plant comprises:
✓ water-cooled vacuum chamber – horizontal type;
✓ high-vacuum pump system;
✓ electro-arc evaporators with water-cooled titanium electrodes-cathodes
✓ еlectro-resistant heater;
✓ power supply and a control unit;
✓ dosing gas system for Ar, N2, O2, CH4;
✓ water-cooling system.
Working space dimensions, D x H , mm | 370 x 300 |
Low voltage electro-arc power, pcs | 3 |
Maximum working temperature, °С | 650 |
Limited vacuum, hPa | 1.10-6 |